Logical Sequencer
The Logical Sequencer series comprises programmable sequencers and a related operator interface used to control multi-step processes in industrial equipment. These devices manage sequenced inputs and outputs and provide operator interaction through a membrane keypad and display. The series is associated with semiconductor processing equipment such as HMDS vapor prime ovens and plasma systems.
Products in this family come from multiple manufacturers, including Blackroom and YES, and cover both sequencer controllers and a display keyboard used to interface with the YES Logical Sequencer.
Products in This Series
- Logical Sequencer controllers — programmable process sequencers for coordinating multiple inputs and outputs.
- Display keyboard / membrane keypad — operator interface for the YES Logical Sequencer (model 01-790-0305187).
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